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Components
Antechamber
Items:
27
18
9
1510000
Clamping cover antechamber, D=100mm
1510006
Bayonet cover antechamber, D=100mm
1510002
Bayonet cover antechamber, D=150mm
1510004
Clamping cover antechamber, D=150mm
1510007
Hinged cover D=150, incl. accessories
1510003
Locking bracket for hinged cover, D=150mm
1510001
Gas spring for main antechamber D=390mm
1510008
Liner cartridge
1510009
Manual status indicator antechamber
1510440
IEC connection Power feedthrough max. 2200 W
1510010
Cover acrylic antechamber D=290
1510502
Atmospheric pressure sensor
1510507
PIRANI gauge
1